[PDF] Limiting current-type MEMS oxygen gas sensor integrated with micro-hotplate


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 journal:2021 IEEE Sensors


Authors:Shunsuke Akasaka; Isaku Kanno

Published date:2021-10-31

DOI:10.1109/sensors47087.2021.9639801

PDF link:https://ieeexplore.ieee.org/stampPDF/getPDF.jsp?arnumber=9639801

Article link:http://dx.doi.org/10.1109/sensors47087.2021.9639801

Article Source:IEEE



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